Scanning Electron Microscope 3D Surface Reconstruction via Optimization

the scanning electron microscope

it is only thirteen years since the scanning electron microscope has been available commercially. yet, even in this short period of time, this instrument has been a powerful tool in the investigation of topography, electrical and magnetic properties, crystal structure, cathodoluminescent characteristics etc. of solid specimens. today, this type of microscope has opened its place alongside the c...

3D Reconstruction from Multiple Images Acquired using a Scanning Electron Microscope (SEM) (2001-)

The goal of this work is to develop the methodology for obtaining accurate, threedimensional measurements of object deformation using a scanning electron microscope. Calibration methods are being developed for the SEM that include novel distortion correction approaches. The 3D reconstruction of the specimen surface is computed using multiple views acquired through motion of the SEM specimen’s s...

Automated 3-D Reconstruction Using a Scanning Electron Microscope

Methods for both the accurate calibration and also the use of an Environmental Scanning Electron Microscope (ESEM) for accurate 3D reconstruction are described. Unlike previous work, the proposed methodology does not require either known motions of a target or use of calibration target with accurate fiducial marks. Experimental results from the calibration studies show the necessity for taking ...

The Scanning Confocal Electron Microscope

The Scanning Confocal Electron Microscope, is an instrument which permits the observation and characterization of sub-surface structures of thick, optically opaque materials at nanometer level resolutions. The instrument merges the capabilities of the scanning, transmission and x-ray microscopes, and achieves unprecedented resolutions in optically dense materials, by implementing the technology...

Surface Analysis Studies on Polymer Electrolyte Membranes Using Scanning Electron Microscope and Atomic Force Microscope